Electron Swarm Parameters in SiH4/H2.

概要

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A Monte Carlo technique is used for investigating electron swarm motion in the presenceof elastic, excitation, ionization and attachment collisions through a SiH4 (20%) /H2 (80%) mixtureunder uniform field conditions. It has been shown that mixing a fraction of SiH4 into thehydrogen gas gives rise to drastic changes in the electron energy distribution function. Thisfact indicates that the swarm parameters in the mixture can not be reduced by combiningeach of the swarm parameters obtained individually in SiH4 and H2 assuming a linear relationshipof the values to their partial pressure ratios. The swarm parameters for drift velocity(υd) , mean energy (ε) , ionization (α/p) , excitation (αex/p) , dissociation (αd/p) and attachment(η/p) coefficients are evaluated directly by using the electron energy distribution functionsobtained by the simulation in the E/p range of 10-2000 V/cmTorr.
岩手大学教育学部の論文