Computer Modeling of the Transient RF Discharge in Nitrogen - A Continuum Model with the Energy Equation -

概要

論文の詳細を見る
A continuum model is used for simulating the development of the transient RFdischarge between parallel plates in nitrogen under a plasma processing condition.Non-equilibrium characteristics of the electron swarm are taken into account usingionization and excitation coefficients obtained by solving the electron energy equationsimultaneously with the continuity equation for electrons. Significant characteristicsof the transient RF discharge such as the temporal variations of the gap voltage, thedischarge power and the discharge current are calcluated by numerically solving thecontinuity equations for electrons and ions using the F. C. T. SHASTA algorithmtogether with Poisson's equation and a RF circuit equation. The spatio-temporal evolutionsof the electron and ion densities, the photon emission of the 2nd positive bandand the space charge field are also calculated. The validity of the present model isdiscussed by comparing these calculated data with experimental observations and withdata obtained by a Monte Carlo technique.
岩手大学教育学部の論文