F-38 クリーンルームにおける扉開閉に伴うコンタミネーションの制御 : その1 制御手法とシステム概要

概要

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A new control system is described for the solution of the contamination problems in case of door usage in a clean room. When a door opens in a clean room, the room pressure could not be held at the setting value. If conventional pressure control is applied, air currents go back and forth, and are mixed. In our system a constant air flow is formed in the doorway. So the risk of contamination will be kept away. Another problem is occurred when the door is closed in conventional control system. While door being opened, the higher side damper is closed, and the lower side damper is opened wide. So at the moument of the door closed, in the higher pressure room the air supplied becomes superfluous. In the lower pressure room air runs short greatly, an air current is inhaled from an unexpected opening. In our system, at the moment of the door operation, the air flow balance is kept stable, so the pressure and the air flow change smoothly under control.
社団法人空気調和・衛生工学会の論文
2006-09-05