2A2-K11 顕微作業用ゴム支持XYZ精密ステージの開発(アクチュエータの機構と制御)

概要

論文の詳細を見る
In this study, a flat microscope stage has been developed for the micromanipulation operated for the microscope. This stage has been developed for installing in the biological microscope that uses 40 times object lens. Design specifications of the stage are as follows. (1) The operational range of stage should be 100μm×100μm×10μm or more. (2) The responsibility of the stage should be 1Hz or more. (3) The positioning performance of the stage should be 1 urn or less. (4) Practicably, the stage should have a compact size to secure operator's work space. To satisfy these specifications, we introduced the principle of operation of the electromagnetic actuator using rubber to the drive system of the stage. The sample stage supported by flexible rubber is driven by electromagnetic force with high-precision. Effectiveness of this stage to the micro manipulation system operated for the microscope has been confirmed.
一般社団法人日本機械学会の論文
2011-05-26