OS1709 ガラス製マイクロ・ナノ光学デバイスの熱インプリント成形試験と有限要素シミュレーション(OS17-3 機能材料2,OS-17 先端材料システムの力学とメゾスケールモデリング)

概要

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In the present paper, some experimental testing and numerical simulations for thermal imprinting of glass-optical devices using finite element method were investigated. Thenno-viscoelastic property of the glass material was estimated using compression creep tests based on traditional thermo-viscoelastic theory. In this study, D263 was used as glass material. Glass thermal imprint tests were carried out with glassy carbon dies that were given to line & space or micro-lens array pattern machined by focused ion beam (NB). The optimum condition of imprinting temperature which given appropriate transcription profile of the glass was investigated. Moreover, numerical simulations for thermal imprinting of the glass were carried out by finite element method. Comparing experimental results with numerical ones, the transcription of height of groove or micro-lens obtained by experimental tests approximately agreed with numerical values.
2011-07-16