面型パターン照明による欠陥検査法の開発 : 欠陥の形状推定

概要

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In the defect inspection method using patterned area illumination, a defect upon an industrial productis detected from an image emphasized by the patterned area illumination. All defects detected by theinspection method, however, is not unsuitable as a finished product. Therefore, GOOD/NG judgmentwhich judges that the defect is good or no-good as a finished product is required frequently. Shapeestimation of a defect is useful for the GOOD/NG judgment. This study proposes a method of the shapeestimation. An image obtained by this inspection method is influenced by size of a pattern on theillumination, because the pattern on the image is reflected image/shadow at slope of the defect that isequal to the shape of the defect. Hence, a difference image between two images obtained by two differentpatterns has information of the slope. We developed the method to estimate the shape of the defect by thedifference image. The utility of the method of shape estimation was confirmed through the simulation andthe experiment.
2008-12-01