MNM-P6-2 フィルム積層型マイクロ光造形(P6 情報・精密機器におけるマイクロ・ナノテクノロジー)

概要

論文の詳細を見る
Targeting to manufacture of micro fluidic chip masters, the feasibility of the new micro stereo lithography which featured the UV-resin film stacking process was studied. This UV-resin film supplied by Lintec Co. was easily developed by ethanol and it showed high resolution of 〜10 μm, enough robustness against recording laser power and also very small thickness deviation. With the great help of such advantages, we succeeded in making a two-depth sample whose minimum channel width was 50 μm at the height of 80 μm.
2010-10-12