1024 炭素系固体表面へのクラスター衝突の解析と熱力学的スパッタリングモデル(OS10.電子・原子・マルチシミュレーションに基づく材料特性評価(6:ナノクラスター・ナノチューブ),オーガナイズドセッション)

概要

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Molecular dynamics simulations of (CO_2)_N (N=1-20) cluster impact onto four different carbon-based surfaces were investigated in this study. The sputtering yield strongly depended on the density of the target material and the collision energy, and the yield and inner-surface area of the crater showed linear-like correlation. Furthermore, MD simulations of (CO_2)_N (N=192, 288 and 390) thin film impact on amorphous carbon surface were also carried out as the first step toward the physical modeling of the crater formation mechanism. The impulsive compression pressure acted onto the surface within a short moment, and the solid surface still continued to move downward after the moment due to the inertial force.
一般社団法人日本機械学会の論文
2009-10-10