T0501-5-3 簡単な3DOF気体式角速度センサの設計と数値シミュレーション([T0501-5]マイクロ・ナノスケールの熱流体現象(5))

概要

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This paper reports on the design and simulation of a MEMS based convective gyroscope which can independently detect three components of angular rate(3DOF). The device includes three layers in which only the layer containing in-plane hotwires requires standard MEMS process. The other layers can be fabricated by conventional machining. Jet flow in the device is generated by piezoelectric actuator which is high response and available in commerce. Therefore, the size and the cost of sensor will be significantly reduced. The sensor provides accurate measurement with small cross-sensitivity, since the integration of 3DOF measurement eliminates the sensor-to-sensor misalignment. The sensor also has high shock resistance since no proof mass is used.
一般社団法人日本機械学会の論文
2010-09-04