1A2-O05 FIB-CVD End Effectors Nano Temperature Sensor : For Local Temperature Sensing in Water Environment
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概要
- 論文の詳細を見る
FIB-CVD has proven its great potential in the fabrication of 3D nano-structured devices with high precision and accuracy. In this paper, we show the fabrication of a FIB-CVD nano temperature sensor over the tip of a cantilever, to act as an end-effectors temperature sensor. The FIB-CVD temperature sensors were constructed by consequent deposition and etching of tungsten over a piezo type AFM cantilevers which have built in electrodes. The sensor was calibrated in water using the heating stage of an environmental scanning electronic microscope. The experimental results demonstrate the great potential of FIB-CVD thermal sensors for sensing temperature in different environments
- 一般社団法人日本機械学会の論文
- 2007-05-11
著者
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Arai Fumihito
Department Of Bioengineering And Robotics Tohoku University
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ELSHIMY Haitham
Micro and Nano Systems Engineering Department Nagoya University
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NAKAJIMA Masahiro
Micro and Nano Systems Engineering Department Nagoya University
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IMAIZUMI Yoshiaki
Micro and Nano Systems Engineering Department Nagoya University
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FUKUDA Toshio
Micro and Nano Systems Engineering Department Nagoya University
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