光電子倍増管によるTHERMAL ELECTRON検出に基づくマイクロマテリアルの温度測定法に関する一考察

概要

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This note presents about an idea including the temperature measurement technique for micro material by using photomultiplier combined in scanning electron microscope. Recently, application of micro material is extending to more wide area in engineering field, and the environment which the material is employed is also spreading from low to high temperatures. According to this situation, an importance of the temperature measurement technique for such micro material is increasing. In this study, the simple technique based on the detection of thermal electro radiated from the material surface by photomultiplier in SEM vacuum chamber is considered. Richardson-Dushman relation certifies that the current density by thermal electron increases with temperature. Application of this technique to SUS thin film heated up to 1300K showed that the proposed method was available.
2010-12-25