Fabrication of gas sensor using Pd doped SnO_2 nanofibers(Session 6A : TFTs and Sensors)
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概要
- 論文の詳細を見る
By application of oxide nanofibers and carbon nanotubes as sensing materials on micro platforms, gas sensor is designed and successfully fabricated. A micro platform is developed to have three layers, namely, Pt heater layer (bottom), insulator layer (middle) and sensing layer (top), on the Si membrane. SnO_2 nanofiber powders are used as the sensing materials, which are mixed with the organic binder (Ethyl cellulose and crterpineol) to make it printable. A gas response property of the fabricated sensor for H_2S gas, consecutively, was investigated.
- 2010-06-23
著者
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Choi Jinnil
Display and Nanosystem Lab., College of Engineering, Korea University
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Park Jung-Ho
Display and Nanosystem Lab., College of Engineering, Korea University
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Dong Ki-Young
Display and Nanosystem Lab., College of Engineering, Korea University
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Ju Byeong-kwon
School Of Electrical Engineering College Of Engineering Korea University
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Hwang In-Sung
Division of Materials Science and Engineering, Korea University
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Ham Dae-Jin
Display and Nanosystem Lab., College of Engineering, Korea University
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Dong Ki-young
Display And Nanosystem Lab. College Of Engineering Korea University
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Choi Jinnil
Display And Nanosystem Lab. College Of Engineering Korea University
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Hwang In-sung
Division Of Materials Science And Engineering Korea University
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Park Jung-ho
Display And Nanosystem Lab. College Of Engineering Korea University
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Ju Byeong-kwon
Display And Nanosystem Lab. College Of Engineering Korea University
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Ham Dae-jin
Display And Nanosystem Lab. College Of Engineering Korea University
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Lee Jong-heun
Division Of Materials Science And Engineering Korea University
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