Fabrication of Oxide Thin Film Transistor based on SOG dielectric and solution ZnO(Session 6A : TFTs and Sensors)
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概要
- 論文の詳細を見る
In this paper, we demonstrate ZnO TFTs useless vacuum processes. SiO2 as a dielectric layer was formed on the silicon and glass substrate using a spin on glass (SOG). On top of SiO_2 layer, ZnO thin films are spun using sol-gel method from a IPA solution of zinc acetate dehydrate stabilized by 2-aminoethanol. So, we have to hydrophilic of SiO_2 surface for enhanced coating process (ZnO layer) treatment using RIE system. In last process, sources and drain electrodes are made of N-type metal (Mo) using dc-sputter. In order to analyze the characteristics of device, we used X-ray diffraction (XRD), scanning electron microscopy (SEM), and the current-voltage (I-V) characteristics of these TFTs are measured by semiconductor parameter analyzer characterization systems.
- 2010-06-23
著者
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Choi Jinnil
Display and Nanosystem Lab., College of Engineering, Korea University
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Park Jung-Ho
Display and Nanosystem Lab., College of Engineering, Korea University
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Dong Ki-Young
Display and Nanosystem Lab., College of Engineering, Korea University
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Ju Byeong-Kwon
Display and Nanosystem Lab., College of Engineering, Korea University
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Ju Byeong-kwon
School Of Electrical Engineering College Of Engineering Korea University
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Park Jung
Display and Nanosystem Laboratory, School of Engineering, Korea University
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Chang Seongpil
Display and Nanosystem Laboratory, School of Engineering, Korea University
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Park Eun-Mi
Display and Nanosystem Laboratory, School of Engineering, Korea University
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Dong Ki-young
Display And Nanosystem Lab. College Of Engineering Korea University
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Choi Jinnil
Display And Nanosystem Lab. College Of Engineering Korea University
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Partk Eun-mi
Display And Nanosystem Lab. College Of Engineering Korea University
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Park Jung-ho
Display And Nanosystem Lab. College Of Engineering Korea University
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Chang Seongpil
Display And Nanosystem Laboratory School Of Engineering Korea University
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Ju Byeong-kwon
Display And Nanosystem Lab. College Of Engineering Korea University
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