Scalable Short-Open-Interconnect S-Parameter De-Embedding Method for On-Wafer Microwave Characterization of Silicon MOSFETs(Active Devices/Circuits,<Special Section>Microwave and Millimeter-Wave Technology)
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概要
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In this paper, we propose an accurate and scalable S-parameter de-embedding method for RF/microwave on-wafer characterization of silicon MOSFETs. Based on cascade configurations, this method utilizes planar open, short, and thru standards to estimate the effects of surrounding parasitic networks on a MOS transistor. The bulk-shielded open and short standards are used to simulate and de-embed the probe-pad parasitics. The thru standard are used to extract the interconnect parameters for subtracting the interconnect parasitics in gate and drain terminals of the MOSFET. To further eliminate the parasitics of dangling leg in source terminal of the MOSFET, we also introduce the microwave and multi-port network analysis to accomplish the two-port-to-three-port transformation for S-parameters. The MOSFET and its corresponding de-embedding standards were fabricated in a standard CMOS process and characterized up to 40GHz. The scalability of the open, short, and thru standards is demonstrated and the performance of the proposed de-embedding procedure is validated by comparison with several de-embedding techniques.
- 社団法人電子情報通信学会の論文
- 2007-09-01
著者
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Wang Yueh-hua
Department Of Communication Engineering National Chiao-tung University
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Wu Lin‐kun
Department Of Communication Engineering National Chiao-tung University
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CHO Ming-Hsiang
Department of Communication Engineering, National Chiao-Tung University
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WU Lin-Kun
Department of Communication Engineering, National Chiao-Tung University
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Wu Lin-kun
Department Of Communication Engineering National Chiao-tung University
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Cho Ming-hsiang
Department Of Communication Engineering National Chiao-tung University
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Cho Ming
National Nano Device Laboratories
関連論文
- A Flexible Microwave De-Embedding Method for On-Wafer Noise Parameter Characterization of MOSFETs
- Scalable Short-Open-Interconnect S-Parameter De-Embedding Method for On-Wafer Microwave Characterization of Silicon MOSFETs(Active Devices/Circuits,Microwave and Millimeter-Wave Technology)
- A Cascade Open-Short-Thru (COST) De-Embedding Method for Microwave On-Wafer Characterization and Automatic Measurement(Microelectronic Test Structures)
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