Micromachining of glass by using a Nd : YAG (532nm) laser for the optical device

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概要

• 論文の詳細を見る

• Suitable types of glass for laser micromachining using a Nd:YAG laser have been developed. The composition of these types of glass is (70-x)SiO_<2-x>B_2O_3・10Na_2O・10CaO (x=0, 10, 15, 20, 25, 30). These types of glass contain the Co ions found in a glass matrix (adding to the mother glass). After machining with the 2nd harmonic beams of a pulsed Nd:YAG laser, the bump in the glass host, the pit at the bump in the glass host and the sole pit were all formed. This report was conducted for researching the relationship between bonding intensity of glass and thermo-mechanical properties, and for finding out the possibility of the fabrication of optical device. The maximum height of the bump in the glass was 16μm and had a radius was 262.3μm. We found that the Co ions acted as sensitizers in the laser machining of the glass and this process can be used for optical device fabrication process.

• 社団法人日本セラミックス協会の論文
• 2008-02-01

著者

• Lee K.

  Division Of Materials Science And Engineering Pusan National University

• KIM T.

  Division of Materials Science and Engineering, Pusan National University

• JUNG Y.

  Division of Materials Science and Engineering, Pusan National University

• KIM Y.

  Division of Materials Science and Engineering, Pusan National University

• CHIN H.

  Division of Materials Science and Engineering, Pusan National University

• RYU B.

  Division of Materials Science and Engineering, Pusan National University

• KANG H.

  National Nanofab Center

• LEE S.

  National Nanofab Center

• Kim T.

  Division Of Electronics And Computer Engineering Hanyang University:department Of Nanoscale Semicond

• Jung Y.

  Division Of Materials Science And Engineering Pusan National University

• Kim Y.

  Division Of Materials Science And Engineering Pusan National University

• Chin H.

  Division Of Materials Science And Engineering Pusan National University

• Ryu B.

  Division Of Materials Science And Engineering Pusan National University

• Kim T.

  Division Of Materials Science And Engineering Pusan National University

• LEE S.

  National Fusion Research Center, Daejeon 305-333, Korea

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