Development of High Power Electron Beam Gun (Report I) : Generation of High Power Electron Beam with LaB_6 Cathode(Physics, Process, Instruments & Measurements)

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概要

• 論文の詳細を見る

• Although LaB_6 is often used for the cathodes of electron microscopes, electron beam lithographers and similar devices which emit a very small quantity of thermal electrons, the authors tried applying LaB_6 for the cathode of a high power, high energy density electron beam. The electron beam properties generated by a directly heated type and indirectly heated type (bombardment type) LaB_6 cathode were then investigated. It was found that the LaB_6 cathode generated a stable high power electron beam. A beam current of 450mA was obtained with a 3.5mm φ directly heated type cathode at an acceleration voltage of 60kV and a cathode temperature of 1890K, about 1000K lower than that of a tungsten cathode.

• 大阪大学の論文

著者

• ARATA Y.

  Osaka University

• Abe N

  Osaka Univ. Osaka Jpn

• TOMIE M.

  Osaka University

• ABE N.

  Osaka University

• KATO Y.

  College of Industrial Technology

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