テーブルの弾性振動を考慮したアクティブ微振動制御手法の研究(機械力学,計測,自動制御)

概要

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This paper presents a robust control method for a microvibration control system with elastic vibration of a table. In order to avoid the spillover phenomena, reduced-order mathematical models, which include higher modes, are used in this design technique. The feedback controller is derived by using the generalized model-matching method described in this paper. The system uses a 453-kg, 2.0×1.4-meter aluminum table as the vibration isolation object, being supported in 10 places (six vertical and four horizontal) by piezoelectric actuators. Rubber supports are installed between the table and the actuators. In the design technique, the overall system is divided into modal systems with the control system for each being independently designed. Experimental results are also presented.
一般社団法人日本機械学会の論文
1997-06-25