Dielectric Response of c-Oriented SrBi_2Ta_2O_9 Thin Films Observed with Interdigital Electrodes
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概要
- 論文の詳細を見る
The dielectric properties of the c-oriented SrBi_2Ta_2O_9 (SBT) thin films are investigated with interdigital surface electrodes. The films are grown directly on MgO (100) substrates by pulsed laser deposition. The typical values of dielectric constant and dissipation factor at 100kHz for 100-nm-thick SBT films are estimated to be ε_r, 〜 270 and tanδ 〜 0.011, respectively. We have also investigated the dependence of the dielectric properties on the thickness and crystalline quality of the film.
- 社団法人応用物理学会の論文
- 2002-11-30
著者
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Kawayama I
Osaka Univ. Osaka Jpn
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Kawayama Iwao
Research Center For Superconductor Photonics Osaka University
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TONOUCHI Masayoshi
Research Center for Superconducting Materials and Electronics, Osaka University
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Kotani Kenji
Research Institute Of Electrical Communication Tohoku University
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KOTANI Kenta
Research Center for Superconductor Photonics, Osaka University
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