Improvement in the Selectivity of Semiconducting Resistive-type NO_2 Sensors Linked with Calorimetric Hydrocarbon Sensors

概要

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Improvement in the selectivity of semiconducting resistive-type NO_2 sensors has been achieved by numerical compensation derived from the output of calorimetric hydrocarbon sensors. The electrical resistance of resistive-type sensors using thick-film SnO_2 increases due to exposure to NO_2, whereas its resistance is decreased by i-C_4H_<10>. Oxidizing gases such as O_2 and NO_2 which are electronegative are adsorbed on the surface of n-type semiconductors, whereas reducing gases such as hydrocarbons and carbon monoxide react with these adsorbed oxidizing gases, causing electrons to return to the semiconductor. Calorimetric sensors are based on the principle of catalytic combustion between reducing gases and atmospheric oxygen on the surface of gas-detecting materials, therefore they are sensitive to reducing gases such as hydrocarbons, but are insensitive to oxidizing gases. It was found that the resistance of NO2 sensors in the range from 0 to 100 ppm NO_2 was unaffected by the co-existence of 0 to 300 μm i-C_4H_<10> using a semiconducting NO_2 sensor, a calorimetric sensor and numerical compensation.
社団法人応用物理学会の論文
2002-09-15