Thermal Analysis of Thin-Film Vertical-Cavity Surface-Emitting Lasers Using Finite Element Method

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概要

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• The thermal characteristics of thin-film vertical-cavity surface-emitting lasers (VCSELs) have been studied by means of finite element analysis. The thin-film VCSELs transferred onto a selected substrate, which we have already demonstrated, are very attractive for integrated optoelectronic devices. However, structural design based on thermal analysis is required to improve the performance especially for small aperture VCSELs. We confirmed that an AlN submount used as the transferred substrate was satisfactory from the viewpoint of thermal conductivity. We also numerically showed that an Au plating layer on the top surface and an oxide-defined layer would improve the thermal characteristics. Although the thermal resistance R_<th> of 5 μm air-post thin-film VCSEL is very high, the 5 μm oxide-defined aperture with 35 μm mesa and an Au plating layer of 3μm thickness can reduce R_<th>, by about 27%.

• 社団法人応用物理学会の論文
• 2002-08-15

著者

• OUCHI Toshihiko

  Canon Research Center

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