Generation of Multiple Energy Bandgaps Using a Gray Mask Process and Quantum Well Intermixing
スポンサーリンク
概要
- 論文の詳細を見る
We report a technique for generation of multiple energy bandgaps using a combination of one-step gray mask lithography and low-energy arsenic ion implantation induced disordering. Using this technique, we have successfully integrated 12-section with variable energy bandgaps on a single InGaAs/InGaAsP laser heterostructure. When compared to conventional processes, this novel technique is simple, promising and cost effective.
- 社団法人応用物理学会の論文
- 2002-02-28
著者
-
Lee Ng
Photonics Research Group School Of Electrical And Electronic Engineering Nanyang Technological Unive
-
Ng Seng
Photonics Research Group School Of Electrical And Electronic Engineering Nanyang Technolgical Univer
-
LAM Yee
Photonics Research Group, Microelectronics Division, School ofElectrical and Electronic Engineering,
-
Lam Yee
Photonics Research Group Microelectronics Division School Of Electrical And Electronic Engineering N
-
Lam Yee
Photonics Research Group School Of Electrical And Electronic Engineering Nanyang Technological Unive
-
Lim Hwi
Photonics Research Group School Of Electrical And Electronic Engineering Nanyang Technological Unive
-
Chan Yuen
Photonics Research Group School Of Electrical And Electronic Engineering Nanyang Technological Unive
-
OOI Boon
Phosistor Technologies, Inc
-
AIMEZ Vincent
Centre de recherche sur les Proprietes Electroniques des Materiaux Avances, Department de Genie Elec
-
BEAUVAIS Jacques
Centre de recherche sur les Proprietes Electroniques des Materiaux Avances, Department de Genie Elec
-
BEERENS Jean
Department de Physique. University de Sherbrooke, Sherbrooke, Quebec
-
Ooi Boon
Phosistor Technologies Inc
-
Beerens Jean
Department De Physique. University De Sherbrooke Sherbrooke Quebec
-
Aimez Vincent
Centre De Recherche Sur Les Proprietes Electroniques Des Materiaux Avances Department De Genie Elect
-
Beauvais J
Centre De Recherche Sur Les Proprietes Electroniques Des Materiaux Avances Department De Genie Elect
関連論文
- All-Optical Demultiplexing Using LiNbO_3 Quasiphase-Matched WaVelength Converters : Optics and Quantum Electronics
- Fixed-in Variable-out Wavelength Vonversion Using LiNbO_3 Quasiphase-Matched Wavelength Vonverter : Optics and Quantum Electronics
- Atomic Layer Deposition - and Chemical Vapor Deposition-TiN Top Electrode Optimization for the Reliability of Ta_2O_5 and Al_2O_3 Metal Insulator Silicon Capacitor for 0.13μm Technology and Beyond
- Effects of Step Coverage, Cl Content and Deposition Temperature in TiN Top Electrode on the Reliability of Ta_2O_5 and Al_2O_3 MIS Capacitor for 0.13μm Technology and Beyond
- Generation of Multiple Energy Bandgaps Using a Gray Mask Process and Quantum Well Intermixing