Highly Textured La-Ca-Mn-O Thin Films Grown on SiO_2/Si(100)
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概要
- 論文の詳細を見る
Degree of textured depending on process parameters and magnetoresistance of La-Ca-Mn-O films grown on amorphous-SiO_2-buffered Si(001) substrate by rf sputtering were investigated. The amorphous SiO_2 buffer could facilitate the degree of [00τ] texturing that is quantitatively correlated with sputtering temperature and oxygen partial pressure. The film exhibited MR value of 700% near 15K at the deposition substrate temperature 700℃ under 10mTorr oxygen partial pressure. An optimum oxygen partial pressure and a suitable substrate temperature were required for acquiring a highly textured crystallinity and MR effect. Subsequent high temperature post annealing, however, apparently deteriorated film structure and MR effect. [DOI: 10.1143/JJAP.41.600]
- 社団法人応用物理学会の論文
- 2002-02-15
著者
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Tsai Fang-wen
Department Of Materials Science And Engineering National Tsing Hua University
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Chin Tsung-shune
Department Of Materials Science & Engineering Tsing Hua University
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FANG Jau-Shiung
Department of Materials Science and Engineering, Tsing Hua University
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CHlN Tsung-Shune
Department of Materials Science and Engineering, National Tsing Hua University
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Fang Jau-shiung
Department Of Materials Science And Engineering National Huwei Institute Of Technology
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Chln Tsung-shune
Department Of Materials Science And Engineering National Tsing Hua University
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