スクリュー式ポンプと圧電素子駆動ピストンで構成されるディスペンサの研究 : 基本構造の提案と飛翔塗布実験(機械要素,潤滑,工作,生産管理など)

概要

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The dispenser is used in various fields, such as semiconductor packaging, printed circuit board assembly, and electronic component assembly. While the miniaturization of an electric device progresses, the application with a highly precise dispensing is called for. In this paper, we propose the new dispenser of jet system, which consists of a screw pump and a piezoelectoric actuator in order to reply to the above-mentioned request. (1) For the proposed dispenser, theoretical analysis that calculates discharge pressure and flow late was carried out. The theoretical value of a pressure waveform showed good approximation to the experimental result. (2) Using high-viscosity and powdered fluids (the particle diameter are 0.8〜10μm), "Jet dispensing" experiment was done. We could jet the volume of 8 nl〜20 nl/dot, dispense cycle is 5 msec (200 kHz) per dot, distance of a substrate and a nozzle is detached 1.5 mm and the speed of a stage is 300 mm/s. (3) The dispenser of this development can adjust the volume per dot by changing the number of rotations of a screw pump. As for the structure of this new type dispenser, high reliability is obtained for the stopped up prevention of the passage. The reason why is to be able to keep very bigger than particle diameter of 1〜10μm at any time as for the size of all passage.
一般社団法人日本機械学会の論文
2005-12-25