リング電極方式容量結合型高周波放電に対する2種類の高周波電界の重畳効果(その3)

概要

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In a inductively or capacitively coupled r.f.discharge by a single frequency, the transition voltage Vc or Pc from glow to arc discharge depends on the gas pressure p. When superposing two applied fields with different frequencies at the same time, if Vc decreases comparing with the value of single frequency discharge, r.f.discharge plasma with high ionization state can be easily generated. Effects of superposing two applied fields with different frequencies, that is, 2MHz and 13.5MHz have been studied. As a result, Vc of 2MHz side has decreases by the superposed effects in the low pressure region(ω>ν),but Vc has not decreases by the superposed effects in the high pressure region (ω<ν). Variations of Pc by the superposed effects in the discharge space of 13.5MHz side have not been able to in all pressure region. In this paper, it is described that the difference of the superposed effect was theoretically studied from the absorption electric power of plasma electron in the low pressure region (ω>ν).
福井工業大学の論文
2006-03-18