リング電極方式容量結合型高周波放電に対する2種類の高周波電界の重畳効果(その2)

概要

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In a inductively or capacitively coupled r.t. discharge by a single frequency, the transition voltage vc or Pc from glow to arc discharge depends on the gas pressure p. When superposing two applied fields with different frequencies at the same time, if Vc decreases comparing with the value of single frequnecy discharge, r.f.discharge plasma with high ionization state canber easily generated. Effects of superposing two pllied fields with dirrerent frequencies, that is, 2MHz and 13.5MHz have beenstudied. As aresult, Vc of "MHz side has decreases by the superposed effects in the low pressure region(ω<υ), but Vc has not decreases by the superposed effets in the pressure region (ω<υ). Variations of Pc by the supreposed effects in the discharge space of 13.5MHz side have not been able to in all pressure regio. In this paper, it is described that the dirrerence of the superposed effect was studied from the meausurement of the electric destiny.
福井工業大学の論文
2005-03-18