超精密直径測定機の開発

概要

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A new laser interferometric measuring machine for the sphere diameter has been developed. In the measuring machine, a 633nm commercial stabilized He-Ne laser and a variable length vacuum cell made of metal bellows are employed. It became possible to make a vacuum on the laser beam path, so the air turbulences are excluded and the effect of refractive index of the air is eliminated. The Abbe's principle on the alignment of the workpiece with the measurement laser beam is satisfied. Moreover, a control mechanism for measurement contact force, which is coincided with the axis of the measurement laser beam, is developed and applied to the measuring machine. As a result concerning the measuring machine, 10.4nm (σ) of the measurement reproducibility is confirmed and 74nm (k=2) of expanded uncertainty is estimated.
公益社団法人精密工学会の論文
2006-09-05