炭素イオンビームによる材料の表面改質

概要

論文の詳細を見る
To improve the properties of materials, carbon and carbide thin films were prepared by using the ion beam assisted deposition (IBAD) method, in which the deposition of high purity metallic materials as Ti and Cr, and the bombardment with 200 eV C and/ or Ar ions were carried out simultaneously. Substrates used were glass and steel. To examine the performance of films, the adhesion was evaluated with a tensile pull-off tester and the surface morphology was observed by a laser microscope. The composition and the crystal structure of films were analyzed by X-ray fluorescence spectrometry and glancing angle X-ray diffractometry, respectively. The relations among these characteristics have been discussed and summarized.
久留米工業大学の論文
2006-06-20