二重管式チャンバーによるクリーンルーム構成材から発生する揮発性有機化合物の評価方法

概要

論文の詳細を見る
Volatile organic compound (VOC) is one of the most important factors to control the chemical contamination in a cleanroom. The cleanroom material is one of VOC sources. Several methods for measuring VOC emissions from cleanroom materials have been developed. The chamber test method has been frequently used to evaluate VOC emission rate of cleanroom materials, but the result of this method is different from actual conditions (surface, airflow, temperature, humidity etc.). Then the new method of chamber test to measure VOC emissions from surface of materials was developed. The new chamber is made of glass and has the feature that VOC emissions from material surface are measured correctly. This report describes the characteristics of the double-cylinder chamber and provides an example of its function.
1999-06-30