Evaluation of Pentafluoroethane and 1, 1-Difluoroethane for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-07-30
著者
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Reif Rafael
Microsystems Technology Laboratories Mit
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Reif Rafael
Microsystems Technology Laboratories Massachusetts Institute Of Technology
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KARECKI Simon
Microsystems Technology Laboratories, MIT
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CHATTERJEE Ritwik
Microsystems Technology Laboratories, MIT
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PRUETTE Laura
Microsystems Technology Laboratories, MIT
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SPARKS Terry
Motorola Advanced Products Research and Development Laboratory
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BEU Laurie
Motorola Advanced Products Research and Development Laboratory
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VARTANIAN Victor
Motorola Advanced Products Research and Development Laboratory
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Karecki Simon
Microsystems Technology Laboratories Mit
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Pruette Laura
Microsystems Technology Laboratories Mit
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Vartanian Victor
Motorola
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Chatterjee Ritwik
Microsystems Technology Laboratories Mit
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Beu Laurie
Motorola
関連論文
- Evaluation of Pentafluoroethane and 1, 1-Difluoroethane for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool
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