Deposition and Characterization of Silicon-Germanium Alloy Thin Films on Oxide

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概要

• 論文の詳細を見る
• 1996-08-26

著者

• Reif Rafael

  Microsystems Technology Laboratories Mit

• Reif Rafael

  Microsystems Technology Laboratories Massachusetts Institute Of Technology

関連論文

• Evaluation of Pentafluoroethane and 1, 1-Difluoroethane for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool
• Deposition and Characterization of Silicon-Germanium Alloy Thin Films on Oxide
• Resistivity Study of P-, B-, and BF_2-Implanted Polycrystalline Si_Ge_x Films with Subsequent Annealing

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