Work Function and Surface Segregation Study on Nb/Ti/Cu Multilayer Films
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概要
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Work function variation with surface segregation of underlayer elements was studied to enable the utilization of saturation behavior in segregation phenomena for work function control. Surface composition of Nb film/Ti film/Cu substrate was monitored by X-ray photoelectron spectroscopy (XPS) at elevated temperatures. Cu and Ti segregated after a certain period of time; the surface concentration of Cu saturated first followed by that of Ti. Both Cu and Ti were observed only at the surface region less than 1nm thick. Using a Kelvin probe, a monotonous work function decrease with increasing Cu and Ti concentration was observed. The amount of decrease at Cu saturation (Cu: 5 at.%, Ti: 20 at.%) was 0.2 eV and that at Ti saturation (Cu: 5 at.%, Ti: 30 at.%) was 0.3 eV. It was determined that the sample worked as a getter for residual gas and the work function on the surface with saturated segregation was stable.
- 社団法人応用物理学会の論文
- 2000-07-30
著者
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Yoshihara Kazuhiro
National Research Institute For Metals
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Yarrama Reddy
National Research Institute For Metals
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Yoshihara Kazuhiro
National Institute Of Animal Health
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YOSHITAKE Michiko
National Research Institute for Metals
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Yoshitake M
Nanomaterials Laboratory National Institute For Materials Science
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Yoshitake Michiko
National Institute For Materials Science
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