Structural Properties of P-Type Microcrystalline Silicon as a Window Layerof Solar Cells

概要

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Microcrystalline silicon(μc-Si)material has been used widely for amorphous silicon-based solar cells as a window layer and a tunnel junction layer.In such application the layer are very thin, thus, the film properties of the initial growth stage of the μc-Si layer strongly affect the performance of solar cells.We studied the structural properties of the p-type μc-Si layer used for the window layer of p-i-n solar cells and the relationship between them and the photovoltaic performance.To observe the structural properties, measurements such as Raman scattering spectra, scanning electron microscopy and transmission electron microscopy were carried out with samples having a p-i-n cell structure.The results show that the μc-Si layer structure strongly depends on the substrate temperature, and that thephotovoltaic performance of the solar cell also varies with the substrate temperature of the μc-Si layer deposition.The effect of the structual properties of the μc-Si layer on the device performance was discussed on the basic of these studies.
社団法人応用物理学会の論文
2000-08-15