金属薄膜の機械特性に及ぼす低エネルギーイオン照射の影響(S05-3 薄膜の強度物性,S05 薄膜の強度物性と信頼性)

概要

論文の詳細を見る
A method of improving mechanical properties of Al thin films by low energy ion irradiation treatment after the deposition was proposed in this study. Young modulus and hardness of Al thin film were increased, spacing of lattice planes d was decreased and peak intensity of Al(111) was increased after the irradiation. The proposed treatment method is expected to improve surface mechanical properties of metal thin films deposited by various formation techniques.
一般社団法人日本機械学会の論文
2004-09-04