Preparation and Properties of SrBi_2Ta_2O_9 Ferroelectric Thin Films Using Excimer UV Irradiation and Seed Layer

スポンサーリンク

概要

• 論文の詳細を見る

• Low-temperature processing of SrBi_2Ta_2O_9 (SBT) thin films on Pt(200nm)/Ti(50nm)/SiO_2/Si substrates was investigated by the sol-gel method. The excimer UV irradiation onto as-deposited SBT thin films at 200-300℃ in O_2 atmosphere and the use of a Sr-Ta-O seed layer were very effective in lowering the crystallization temperature for SBT thin films to 500℃. The SBT thin films prepared by an excirner uv process and subsequent rapid thermal annealing process with the seed layer showed a homogeneous and smooth surface microstructure with fine grains of approximately 50nm in size The 600℃-annealed SBT thin films of approximately 200nm thickness with the seed layer exhibited a Pr of 2.3μC/cm^2 and a Ec of 43kV/cm.

• 社団法人応用物理学会の論文
• 2001-09-30

著者

• TOGAWA Daichi

  Department of Materials Science, Shonan Institute of Technology

• Hayashi Takashi

  Shonan Institute of Technology

• Togawa D

  Shonan Inst. Technol. Kanagawa Jpn

• TOGAWA Daichi

  Shonan Institute of Technology

• Hayashi Takashi

  Shonan Inst. Of Technol.

関連論文

• Fabrication and Properties of (Bi,La)4Ti3O12 Thin Films through Metal-Organic Compounds (特集 高精度電子部品材料)
• Excimer UV Processing of (Bi,Nd)_4Ti_30_ Ferroelectric Thin Films by Chemical Solution Deposition Method
• Preparation and Properties of Bi_La_xTi_3O_ Ferroelectric Thin Films Using Excimer UV Irradiation
• Temperature dependence of the electrical and electromechanical properties of Ba(Zr0.2Ti0.8)O3 thin films prepared by chemical solution deposition
• Chemical Solution Processing and Properties of (Bi,Nd)_4Ti_3O_ Ferroelectric Thin Films
• Low-Temperature Sintering and Properties of (Pb, Ba, Sr)(Zr, Ti, Sb)O_3 Piezoelectric Ceramics Using Sintering Aids
• Preparation of Na_Bi_TiO_3 by hydrothermal reaction
• Preparation and Properties of SrBi_2Ta_2O_9 Ferroelectric Thin Films Using Excimer UV Irradiation and Seed Layer

スポンサーリンク