Estimation of Hydrothermally Deposited Lead Zirconate Titanate (PZT) Thin-Film
スポンサーリンク
概要
- 論文の詳細を見る
The mechanical output of piezoelectric vibrators, particularly actuators, is determined by the limit of the vibration velocity To obtain large vibration velocity, it is important to deposit a thick piezoelectric film. We have succeeded in depositing thick lead zirconate titanate (PZT) films by the hydrothermal method The thicknesses of the films were 2μm, 9.8μm, 20μm and 30μm when the reaction times were 2, 5, 10, and 15, respectively. We have also estimated Young's modulus of the PZT films from the resonance frequency of the bimorph vibrators From the measurement results. Youug's modulus of the PZT film was 1.3 × 10^10 N/m^2. This value corresponded to only 16% of that of bulk PZT. The piezoelectric constants of hydrothermally deposited PZT film were inferior to those of bulk PZT. To obtain much larger constants, it is necessary to obtain larger Young's modulus.
- 社団法人応用物理学会の論文
- 2001-09-30
著者
-
Kobayashi Yutaka
Tokyo Medical University, Hachiohji Medical Center
-
Kurosawa Minoru
Tokyo Inst. Of Tech.
-
KANDA Takefumi
The University of Tokyo
-
HIGUCHI Toshiro
The University of Tokyo
-
Kanda Takefumi
The University Of Tokyo Department Of Precision Machinery Engineering Graduate School Of Engineering
-
Kurosawa Minoru
Tokyo Institute Of Technology Department Of Advanced Applied Electronics Interdisciplinary Graduate
-
YASUI Hidehiko
The University of Tokyo, Department of Precision Machinery Engineering, Graduate School of Engineeri
-
Yasui Hidehiko
The University Of Tokyo Department Of Precision Machinery Engineering Graduate School Of Engineering
-
Higuchi Toshiro
The University Of Tokyo Department Of Precision Machinery Engineering Graduate School Of Engineering
-
Kobayashi Yutaka
Tokyo Institute Of Technology Department Of Advanced Applied Electronics Interdisciplinary Graduate
-
Kobayashi Yutaka
Tokyo Bay Fisheries Lab. Chiba Prefectural Fisheries Res. Center
関連論文
- OJ-167 The Relationship Between the Occurrence and extent of Delayed Contrast Enhancement on Contrast MRI and Q wave in Antero-Septal OMI(X-ray/CT/MRI/DSA2 (I) : OJ19)(Oral Presentation (Japanese))
- P2-26 Phase shift of Rayleigh wave beneath slider with preload(Short oral presentation for posters)
- Estimation of Resolution and Contact Force of a Longitudinally Vibrating Touch Porbe Sensor Using Lead Ziroconate Titanate (PZT) Thin-Film Vibrator
- Acoustic Field Analysis of Surface Acoustic Wave Dispersive Delay Lines Using Inclined Chirp IDT(Ultrasonics)
- アサリに寄生するウミグモ幼生の鋭敏な検出法の開発
- P1-38 Performance evaluation of miniature ultrasonic probe using PZT poly-crystalline film deposited by hydrothermal method(Poster session 1)
- P1-11 Characteristics of receiving sensitivity of ultrasound sensor using a hydrothermal polycrystalline PZT thick film(Poster session 1)
- A-11-5 Surface Acoustic Wave Atomizer and Electrostatic Deposition
- Investigation of Galfenol for stress-based magnetic force control using inverse magnetostrictive effect
- Estimation of Hydrothermally Deposited Lead Zirconate Titanate (PZT) Thin-Film
- Field and laboratory observations on the hypoxic impact on survival and distribution of short-necked clam Ruditapes philippinarum larvae in Tokyo Bay, central Japan
- Multi Contact Points Slider for A Surface Acoustic Wave Motor (特集:MEMS技術)
- WSIII-1 Development of a Revolutionary Tissue Observation Device
- Automatic object release in magnetic and electrostatic levitation systems
- Theoretical Analysis of Positioning by Air Impact Drive
- On the Design of Wire Parallel Mechanism
- Estimation of the Removal of Chlorophyll a by a Single Cohort of Manila Clam Ruditapes philippinarum Based on the Growth Model and Monitored Field Data in the Sanbanze, Tokyo Bay
- Miniaturization of a V-Shape Transducer Ultrasonic Motor
- Effects of Electrode Configuration for Performances of Voltage-Induction-Type Electrostatic Motors