Miniaturization of a V-Shape Transducer Ultrasonic Motor
スポンサーリンク
概要
- 論文の詳細を見る
The miniaturization of a V-shaped transducer ultrasonic motor (VSM) was carried out. The head block design and nut length were optimized to match resonance frequencies without coupling asymmetric and spurious vibrations. The volume of the new miniaturized VSM was 58% of that of the original VSM. The speed, thrust, and resolution of the new VSM compared favorably with those of the original VSM. A massive ceramics linear stage was driven by the new VSM working in the sole-use VSM feedback control system. For a traveling distance of 20 mm, the stage motion was controlled to remain in the target position plus or minus 1 nm within 350 ms.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2009-07-25
著者
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Kurosawa Minoru
Tokyo Inst. Of Tech.
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ASUMI Kazumasa
Taiheiyo-Cement Corporation
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FUJIMURA Takeshi
Taiheiyo-Cement Corporation
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Kurosawa Minoru
Tokyo Institute of Technology, Yokohama 226-8502, Japan
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Fukunaga Ryouichi
Taiheiyo Cement Corporation, Sendai 981-3206, Japan
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Fujimura Takeshi
Taiheiyo Cement Corporation, Sendai 981-3206, Japan
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