Chemical Etching of {111} Surfaces of GaAs Crystals in H_2SO_4-H_2O_2-H_2O System : Semiconductors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2001-12-15
著者
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SAITO Kaichi
Department of Materials Science and Engineering, Faculty of Engineering and Resourc Science, Akita U
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SUGAWARA Shigeo
Department of Materials Science and Engineering, Faculty of Engineering and Resourc Science, Akita U
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Shoji Mamoru
Optical Disk Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Saito Kaichi
Deparment Of Materials Science And Engineerling Faculty Of Engineering And Resource Science Akita Un
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Sugawara Shigeo
Deparment Of Materials Science And Engineerling Faculty Of Engineering And Resource Science Akita Un
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YAMAUCHI Jin
Department of Materials Science and Engineering, Faculty of Engineering and Resource Science, Akita
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SHOJI Masako
Department of Materials Science and Engineering, Faculty of Engineering and Resource Science, Akita
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Shoji Masako
Optical Disk Systems Development Center Matsushita Electric Industrial Co. Ltd.
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Yamauchi J
Department Of Materials Science And Engineering Faculty Of Engineering And Resource Science Akita Un
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Saito Kaichi
Department Of Materials Science And Engineering Faculty Of Engineering And Resource Science Akita Un
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Sugawara Shigeo
Department Of Materials Science And Engineering Faculty Of Engineering And Resource Science Akita Un
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