X-Ray Double-Crystal Diffractometry of Verneuil-Grown SrTiO_3 Crystals : Structure and Mechanical and Thermal Properties of Condensed Matter
スポンサーリンク
概要
- 論文の詳細を見る
Using a double-crystal arrangement of nearly parallel setting, X-ray Bragg-case diffraction curves were measured for (100) and (110) surfaces of SrTiO_3 crystals, grown by the Verneuil method and used widely as a substrate for fabricating electronic thin film devices. The peak height and half-width of rocking curves (200 and 220 reflections, Cu Kα_1) measured from local areas of samples varied over a wide range with the samples and probed areas, presumably due to the effect of dislocations and other imperfections. A certain proportion of the measured curves was in fair agreement with the theoretical curve for a perfect crystal, being only 1-2 arcsec broader in half-width. The local-area rocking curve measurement provides like this useful information on the perfection characterization of SrTiO_3 crystals. The measurement shows that mechanochemically polished surfaces of the sample crystals are significantly free of polishing strain in both the (100) and (110) samples, while the assessment of the bulk-crystal perfection by the experimental results needs a discussion. Rocking curves were also measured from the entire surface of the sample crystals to obtain an evaluation of overall misorientaion.
- 社団法人応用物理学会の論文
- 2001-11-15
著者
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Yamanaka J
Center For Crystal Science And Technology University Of Yamanashi
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Yamanaka Junji
Institute Of Inorganic Synthesis Faculty Of Engineering Yamanashi University
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Yoshimura Jun-ichi
Institute Of Inorganic Synthesis Faculty Of Engineering Yamanashi University
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SAKAMOTO Takeshi
Institute of Inorganic Synthesis, Faculty of Engineering, Yamanashi University
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Sakamoto Takeshi
Institute Of Inorganic Synthesis Faculty Of Engineering Yamanashi University
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SAKAMOTO Takeshi
Institute of Atomic Energy, Kyoto University
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