An Optimum Design of FIB System with a Beam Crossover : Techniques, Instrumentations and Measurement
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概要
- 論文の詳細を見る
A study was made to optimize an electrostatic ion optical system with an intermediate beam crossover between two focusing lenses. A description was given of an optimization technique with respect to yhe relative displacement of the crossover between the two lenses with short working distances. It was shown that a system with the objective lens operated in the bipotential mode had better focusing properties than that in the unipotential mode. Some numerical examples were presented for the high performance lens system designed with this technique.
- 社団法人応用物理学会の論文
- 1988-08-20
著者
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NODA Tamotsu
Toyohashi University of Technology
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Noda Tamotsu
Superconductivity Research Laboratory Istec
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Noda Tamotsu
Toyohashi Junior College
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TSUMAGARI Takashi
Miyakonojo Nationa College of Technology
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KIMATA Yoshiaki
Toyohashi University of Technology
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OHIWA Hajime
Toyohashi University of Technology
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Tsumagari Takashi
Kac Co. Ltd.
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