Analysis of Mechanical Aberrations in the Eleclrostatic Deflector

概要

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A third-order aberration formula of mechanical aberrations due to various errors in assembling or machining of the electrostatic deflector is derived from a second-order perturbation theory. Mechanical aberrations in a magnetic focusing and electrostatic deflection system are analyzed by utilizing this new formula. The results show that the electrostatic deflector suffers, in general, more serious effects from errors in machining than in assembling if the error magnitudes are almost the same, and also that the edge of the deflection electrodes where the electric field concentrates exerts a greater influence upon occurrence of mechanical aberrations than other portions with less electric field. It is also ascertained that the octopole deflector is much superior to the quadrupole regarding misalignment through numerical comparison between both deflectors.
社団法人応用物理学会の論文
1987-10-20