Preparation of Ferroelectric Thin Films by RF Magnetron Sputtering : T: THIN FILM
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1989-11-30
著者
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KASANAMI Tohru
Murata MFG. Co., Ltd.
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Kasanami Tohru
Murata Manufacturing Co. Ltd.
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OGAWA Toshio
Murata Manufacturing Co., Ltd.
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SENDA Atuso
Murata Manufacturing Co., Ltd.
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Senda A
Murata Manufacturing Co. Ltd.
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Senda Atuso
Murata Manufacturing Co. Ltd.
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Ogawa Toshio
Murata Manufacturing Co. Ltd.
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