Characterization of Residues on Anhydrous HF Gas-Phase Etching of Sacrificial Oxides for Surface Micromachining
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-01-15
著者
-
Kim Youn
Telecommunication Basic Research Laboratory Electronics And Telecommunications Research Institute
-
Jang Won
Telecommunication Basic Research Laboratory Electronics And Telecommunications Research Institute
-
Lee Jong
Telecommunication Basic Research Laboratory Electronics And Telecommunications Research Institute
-
Choi Chang
Telecommunication Basic Research Laboratory Electronics And Telecommunications Research Institute
-
JUN Chi
Telecommunication Basic Research Laboratory, Electronics and Telecommunications Research Institute
-
YANG Haesik
Telecommunication Basic Research Laboratory, Electronics and Telecommunications Research Institute
-
Yang Haesik
Telecommunication Basic Research Laboratory Electronics And Telecommunications Research Institute
-
Lee J
Hynix Semiconductor Inc. Chungchongbuk‐do Kor
-
Jun C
Telecommunication Basic Research Laboratory Electronics And Telecommunications Research Institute
関連論文
- Origin of (111) Twin Lamellae in BaTiO_3 Thin Films on Platinum Substrates
- Ninety Degree Domains in RF-Sputtered BaTiO_3 Thin Films on Platinum Substrates
- Microstructures and Electrical Properties of (Pb, La)TiO_3 Thin Films Grown on the Pt Electrodes with a Percolating Network Structure
- Characterization of Residues on Anhydrous HF Gas-Phase Etching of Sacrificial Oxides for Surface Micromachining
- Stress Characteristics of Multilayered Polysilicon Film for the Fabrication of Microresonators
- Low-Voltage Operating Triode-Type Field Emission Displays Controlled by Amorphous-Silicon Thin-Film Transistors