Microwear of Silicon Surfaces
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概要
- 論文の詳細を見る
A silicon surface and a diamond-like carbon film were scanning scratched in the air. The silicon surfaces scratched with a light load upheaved immediately. This upheaval represents the pre-stage of wear. The silicon surface depressed by heavier scratching began to upheave after some time. This implies that the surface was activated by scratching and adsorbed molecules in the air.
- 社団法人応用物理学会の論文
- 1995-06-30
著者
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KANEKO Reizo
NTT Applied Electronics Laboratories
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ANDOH Yasuko
NTT Integrated Information & Energy Systems Laboratories
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Andoh Yasuko
Ntt Interdisciplinary Research Laboratories
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Kaneko Reizo
Ntt Advanced Technology Corp.
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