Wear Durability and Adhesion Evaluation Methods for Ultrathin Overcoat Films by Atomic Force Microscopy

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概要

• 論文の詳細を見る

• A method has been developed for evaluating the wear durability and adhesion characteristics of ultrathin overcoat films. The relationship between the wear depth and applied load or between the wear depth and number of scanning-scratch cycles is used in AFM nanowear tests. Inherent wear durability, which is independent of adhesion or substrate hardness, can be evaluated from the relationship between wear depth and applied load at relatively low loads, and the adhesion characteristics can be evaluated from the relationship at relatively high loads. Wear durability can be evaluated with a small number of scanning-scratch cycles and adhesion with a large number of cycles.

• 社団法人電子情報通信学会の論文
• 1998-03-25

著者

• Hirono Shigeru

  Ntt Afty Corporation

• Hirono Shigeru

  Ntt Integrated Information & Energy Systems Laboratories

• ANDOH Yasuko

  NTT Integrated Information & Energy Systems Laboratories

• Andoh Y

  Ntt Integrated Information And Energy Systems Laboratories

• Kaneko R

  The Faculty Of System Engineering Wakayama University

• UMEMURA Shigeru

  NTT Integrated Information and Energy Systems Laboratories

• KANEKO Reizo

  the Faculty of System Engineering, Wakayama University

• Hirono S

  Ntt Afty Corp. Tokyo Jpn

• Kaneko Reizo

  The Faculty Of System Engineering Wakayama University

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• Electrical and Tribological Characteristics of Metal-Doped Carbon Thin Films(Materials,Recent Development of Electromechanical Devices (Selected Papers from ICEC2006))
• Electric Surface Modification of Diamond Like Carbon Film
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• Nanometer-Scale Recording on a Superhard and Conductive Carbon Film Using an Atomic Force Microscope
• Field-Effect Transistor with Deposited Graphite Thin Film

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