SiO_x/TaO_x Gate Insulator a-Si TFT for Liquid Crystal Displays
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1987-09-20
著者
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Ikeda Mitsushi
Toshiba R & D Center
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Ikeda Mitsushi
Toshiba Corporation R&d Center
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Aoki Toshio
Tonen Corporation
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DOHJO Masayuki
Toshiba R & D Center
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AOKI Toshio
Toshiba R & D Center
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Dohjo Masayuki
Toshiba R & D Center
関連論文
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- Measurement of Copper Drift in Methylsilsesquioxane Dielectric Films
- SiO_x/TaO_x Gate Insulator a-Si TFT for Liquid Crystal Displays
- Notes on Compressible Gasket and Bridgman-Anvil Type High Pressure Apparatus
- Characteristics of Link-Type Cubic Anvil, High Pressure-High Temperature Apparatus
- Photolithographic Pattern Transformation by Backside Exposure in a-Si:H Thin-Film Transistor Liquid Crystal Displays