Thin Film Evaluation Techniques for the ESFI SOS Technology

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文

著者

• Takacs D.

  Siemens Ag Research Laboratories

• : A-7:

  Siemens Ag Research Laboratories

• Kuhl Ch.

  Siemens Ag Research Laboratories

• PREUSS E.

  Siemens AG, Research Laboratories

• SCHWIDEFSKY F.

  Siemens AG, Research Laboratories

• SPLITTGERBER H.

  Siemens AG, Research Laboratories

• Preuss E.

  Siemens Ag Research Laboratories

• Schwidefsky F.

  Siemens Ag Research Laboratories

• Splittgerber H.

  Siemens Ag Research Laboratories

関連論文

• Effects of Crystalline Defects on Electrical Properties in Silicon Films on Sapphire
• Thin Film Evaluation Techniques for the ESFI SOS Technology
• Magnetoresistance and the Electronic Structure of Si on Sapphire
• Threshold Voltage Engineering with ESFI SOS MOST's

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