Characterization of Low-Dielectric-Constant Methylsiloxane Spin-on-Glass Films
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-03-15
著者
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YAMADA Noriko
Advanced Materials & Technology Research Laboratories, Nippon Steel Corporation
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Yamada Noriko
Advanced Technology Research Laboratories Nippon Steel Corporation
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TAKAHASHI Toru
Advanced Technology Research Laboratories, Nippon Steel Corporation(Present address)Japan Institute
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Takahashi Toru
Advanced Technology Research Laboratories Nippon Steel Corporation(present Address)japan Institute O
関連論文
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- Annealing Effects on Second Harmonic Generation of Segmented KTiOPO_4 Waveguides
- Refractive Index Profiles of KTi0P0_4 Ion-Exchanged Waveguides and Effect of Barium Ion
- Effects of Alkaline-Earth Elements on Refractive Index Profile and Domain Inversion of Rb-Exchanged Waveguide in KTiOPO_4
- Characterization of Low-Dielectric-Constant Methylsiloxane Spin-on-Glass Films
- Annealing Effects on Second Harmonic Generation of Segmented KTiOPO4 Waveguides
- Characterization of Low-Dielectric-Constant Methylsiloxane Spin-on-Glass Films