Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources

スポンサーリンク

概要

• 論文の詳細を見る

• In the present paper the possibility of application of the regularization method for reliable determination of the position and form of structural features of electron energy distribution is considered. The regularization method is used in the processing of the probe characteristics, measured in gas discharge chambers of broad beam gridded Xe ion sources, with peripheral and with divergent magnetic fields, as well as in an ion accelerator with closed electron drift. Electron energy distribution functions with secondary maxima are observed in the plasma devices.

• 社団法人応用物理学会の論文
• 1998-12-30

著者

• JUNG Hyung-Jin

  Thin Film Technology Research Center, Korea Institute of Science and Technology

• CHOI Won-Kook

  Thin Film Technology Research Center, Korea Institute of Science and Technology

• Choi Won-kook

  Thin Film Technology Research Center Korea Institute Of Science And Technology

• Goncharov Leonid

  Riame Mai Volokolamskoe Shosse

• Antonova Tatjana

  Riame Mai Volokolamskoe Shosse

• Jung Hyung-jin

  Thin Film Technology Research Center Korea Institute Of Science And Technology

• BOUGROV Gleb

  RIAME MAI, Volokolamskoe shosse

• BOUGROVA Antonina

  MIREA, Vernadskogo prospect

• KOH Seoh-Keun

  Thin Film Technology Research Center, Korea Institute of Science and Technology

• KONDRANIN Sergey

  Plasma Tech Co., LTD, Plasma Source and Technology

• KRALKINA Elena

  Plasma Tech Co., LTD, Plasma Source and Technology

• SITIN Evgeniy

  RIAME MAI, Volokolamskoe shosse

• OBUKHOV Vladimir

  RIAME MAI, Volokolamskoe shosse

• Bougrov Gleb

  Riame Mai Volokolamskoe Shosse

• Koh Seoh-keun

  Thin Film Technology Research Center Korea Institute Of Science And Technology

• Sitin Evgeniy

  Riame Mai Volokolamskoe Shosse

• Kralkina Elena

  Plasma Tech Co. Ltd Plasma Source And Technology

• Kondranin Sergey

  Plasma Tech Co. Ltd Plasma Source And Technology

• Obukhov Vladimir

  Riame Mai Volokolamskoe Shosse

• Bougrova Antonina

  Mirea Vernadskogo Prospect

関連論文

• Enhancement of Photoluminescence and Electrical Properties of Ga-Doped ZnO Thin Film Grown on α-Al_2O_3(0001) Single-Crystal Substrate by rf Magnetron Sputtering through Rapid Thermal Annealing(Optics Properties of Condensed Matter)
• Thin Film Growth and Surface Modification by keV Ion Beam
• Electrical and Structural Properties of Ti/Au Ohmic Contacts on N-ZnO:Al
• La-Ca-Mn-O Thin Film based Thermistor for Measuring Low Temperature of 77-230K
• Study of Electron Energy Distribution Functions (EEDFs) in Three DC Low-Pressure Plasma Sources

スポンサーリンク