Novel Porous Films Having Low Dielectric Constants Synthesized by Liquid Phase Silylation of Spin-On Glass Sol for Intermetal Dielectrics
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- 社団法人応用物理学会の論文
- 1997-03-30
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関連論文
- Novel Porous Films Having Low Dielectric Constants Synthesized by a Liquid Phase Silylation of Spin-On Glass Sol for Intermetal Dielectrics
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- Novel Porous Films Having Low Dielectric Constants Synthesized by Liquid Phase Silylation of Spin-On Glass Sol for Intermetal Dielectrics