Distinction of Oxygen and Sulfur in Secondary Jon Mass Spectrometry

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概要

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• The distinction of oxygen and sulfur in secondary ion mass spectrometry has been investigated by nitrogen ion born-bardment, since oxygen and sulfur reciprocally cause interferences of mass numbers. While oxygen and sulfur are detectable by mass numbers 16^+ and 32^-, respectively, mass number 32^- indicates the signal of both oxygen and sulfur whenthe oxygen signal is also provided by mass number 16^- due to a high content of oxygen in the specimen. In this situation, the information on sulfur can be obtained by the discrepancy of signals between mass numbers 32^- and 16^-.

• 社団法人応用物理学会の論文
• 1986-09-20

著者

• Inoue Kazuyuki

  Toyota Central Research & Development Laboratories Inc

• Inoue Kazuyuki

  Toyota Central R&d Labs. Inc.

関連論文

• Sidewall-Less Depth Profiling with Auger Electron Spectroscopy
• Effect of Primary-Ion Current Density on Charge Compensation in SIMS Analysis of a Quartz Glass
• Distinction of Oxygen and Sulfur in Secondary Jon Mass Spectrometry

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